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dc.contributor.author박경현-
dc.contributor.author김선호-
dc.contributor.author최상삼-
dc.contributor.author김동환-
dc.contributor.author변영태-
dc.date.accessioned2024-01-12T13:32:22Z-
dc.date.available2024-01-12T13:32:22Z-
dc.date.issued1997-04-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87947-
dc.title레이저　리소그라피　장비를　이용한　네가티브　마스크　제작방법-
dc.typePatent-
dc.date.registration1997-04-22-
dc.date.application1993-06-19-
dc.identifier.patentRegistrationNumber114555-
dc.identifier.patentApplicationNumber93-11279-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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