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dc.contributor.author민석기-
dc.contributor.author김성일-
dc.contributor.author김무성-
dc.date.accessioned2024-01-12T13:34:23Z-
dc.date.available2024-01-12T13:34:23Z-
dc.date.issued1997-08-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88035-
dc.titleCBr4개스를　이용한　반도체　패턴　측면의　에피성장율　조절방법-
dc.typePatent-
dc.date.registration1997-08-08-
dc.date.application1996-07-12-
dc.identifier.patentRegistrationNumber2682979-
dc.identifier.patentApplicationNumber8-182573-
dc.publisher.countryJA-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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