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Epitaxial growth of strained germanium using InxAl1-xAs buffer layer

Authors

KIM HANSUNG; Shim Jae-Phil; Ju, Gunwu; LIM HEEJEONG; kim seong kwang; Sanghyeon Kim; Kim Hyung-jun

Publisher

2.13~15, 강원도

Citation

한국반도체학술대회

Keywords

Strain; Germanium; stressor layer; InAlAs

URI

https://pubs.kist.re.kr/handle/201004/88291

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KIST Conference Paper > Others

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