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dc.contributor.author임재균-
dc.contributor.author장지수-
dc.contributor.author허성훈-
dc.contributor.author윤정호-
dc.contributor.author김성근-
dc.contributor.author백승협-
dc.contributor.author최지원-
dc.contributor.author강종윤-
dc.contributor.author김진상-
dc.contributor.author송현철-
dc.date.accessioned2024-01-12T14:00:36Z-
dc.date.available2024-01-12T14:00:36Z-
dc.date.issued2023-07-14-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88438-
dc.title원자층 증착법을 이용한 주석 칼코게나이드 2차원 박막의 영역 선택적 증착 방법-
dc.typePatent-
dc.date.registration2023-07-14-
dc.date.application2022-10-12-
dc.identifier.patentRegistrationNumber10-2557055-0000-
dc.identifier.patentApplicationNumber10-2022-0130932-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2022
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