습도 제어를 이용한 전구체 솔루션의 침투 방법

Author
김형철김정훈이승용최만수신성수손지원
Assignee
한국과학기술연구원
Regitration Date
2021-11-16
Registration No.
11,177,482
Application Date
2020-04-28
Application No.
16/759,822
Country
US
URI
https://pubs.kist.re.kr/handle/201004/88700
Appears in Collections:
KIST Patent > 2020
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