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Performance Analysis and Design of FET-Embedded Capacitive Micromachined Ultrasonic Transducer (CMUT)

Authors

Jung seung geun; Kim,Jinsik; Hwang, Kyoseon; Hyun-Yong Yu; Lee, Byung Chul

Publisher

IEEE, 9.18~21, 프랑스

Citation

IEEE International Ultrasonics Symposium 2016, pp.1 - 4

Keywords

CMUT; FET; High frequency; 3-D FEA simulation

URI

https://pubs.kist.re.kr/handle/201004/88910

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KIST Conference Paper > Others

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