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dc.contributor.author김상현-
dc.contributor.author김성광-
dc.contributor.author심재필-
dc.contributor.author김형준-
dc.date.accessioned2024-01-12T14:31:26Z-
dc.date.available2024-01-12T14:31:26Z-
dc.date.issued2018-04-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89106-
dc.titleIII-V족 화합물의 면방향 의존성을 이용한 에피택셜 리프트오프에 의한 반도체 소자의 제조 방법-
dc.typePatent-
dc.date.registration2018-04-10-
dc.date.application2017-06-23-
dc.identifier.patentRegistrationNumber9941168-
dc.identifier.patentApplicationNumber15/631309-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2017
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