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dc.contributor.author전영민-
dc.contributor.author장지웅-
dc.contributor.author박민철-
dc.contributor.author김선호-
dc.contributor.author이택진-
dc.contributor.author이석-
dc.contributor.author변영태-
dc.contributor.author김재헌-
dc.contributor.author우덕하-
dc.date.accessioned2024-01-12T15:01:59Z-
dc.date.available2024-01-12T15:01:59Z-
dc.date.issued2013-06-17-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89696-
dc.title마스크 패턴 검사용 광선 자동차단 영상 획득 시스템 및 그 방법-
dc.typePatent-
dc.date.registration2013-06-17-
dc.date.application2012-02-22-
dc.identifier.patentRegistrationNumber10-1277698-
dc.identifier.patentApplicationNumber2012-0017765-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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