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dc.contributor.author백영준-
dc.contributor.author이욱성-
dc.contributor.author박종극-
dc.date.accessioned2024-01-12T15:03:23Z-
dc.date.available2024-01-12T15:03:23Z-
dc.date.issued2010-10-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89811-
dc.title입방정질화붕소 박막증착방법-
dc.typePatent-
dc.date.registration2010-10-28-
dc.date.application2010-03-15-
dc.identifier.patentRegistrationNumber10-0991770-
dc.identifier.patentApplicationNumber2010-22966-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2010
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