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dc.contributor.author김재경-
dc.contributor.author최준환-
dc.contributor.author박정수-
dc.contributor.author나대석-
dc.date.accessioned2024-01-12T15:03:34Z-
dc.date.available2024-01-12T15:03:34Z-
dc.date.issued2013-07-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89826-
dc.title산소와 수분 투과의 차단 및 가스 배리어 특성 향상을 위한 Co-sputtering 시스템 및 무기 박막 형성 방법-
dc.typePatent-
dc.date.registration2013-07-01-
dc.date.application2010-10-28-
dc.identifier.patentRegistrationNumber10-1282959-
dc.identifier.patentApplicationNumber10-2010-0105898-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2010
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