복합 유전체 박막과, 이를 이용한 캐패시터 및 전계 효과 트랜지스터와, 이들 각각의 제조 방법

Author
김일두송용원김호기김동훈
Assignee
한국과학기술연구원
Regitration Date
2013-10-15
Registration No.
8558324
Application Date
2009-05-04
Application No.
12/387,502
Country
US
URI
https://pubs.kist.re.kr/handle/201004/90159
Appears in Collections:
KIST Patent > 2009
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