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Characteristics of the Coherent EUV Light Source for EUV Metrology

Authors

Kim Yong Soo; Kim Younghee; Park June; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min

Publisher

OSA

Citation

Conference on Laser and Electro-Optics Pacific Rim(CLEO-PR), v.25B2-3, pp.1 - 2

Keywords

EUV; Coherent; HHG; fs Laser

URI

https://pubs.kist.re.kr/handle/201004/90467

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KIST Conference Paper > Others

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