직류방전 플라즈마 화학증착 다이아몬드 합성방법

Author
이재갑은광용백영준
Assignee
한국과학기술연구원
Regitration Date
1997-07-15
Registration No.
5,647,964
Application Date
1995-06-02
Application No.
08/458,761
Country
US
URI
https://pubs.kist.re.kr/handle/201004/90908
Appears in Collections:
KIST Patent > Others
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