KIST Library Institutional Repository

화학증착법에　의한　고순도　구리박막의제조　방법

Author

최형수; 황순택; 임종주; 조영상

Assignee

한국과학기술연구원

Regitration Date

1995-08-15

Registration No.

5,441,766

Application Date

1994-08-25

Application No.

08/295,423

Country

US

URI

https://pubs.kist.re.kr/handle/201004/90911

Appears in Collections:

KIST Patent > Others

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