Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jin Chang Kyu | - |
| dc.contributor.author | Do Kyung Hwang | - |
| dc.contributor.author | Tae-Hwan Kim | - |
| dc.contributor.author | CHOI, WON-KOOK | - |
| dc.date.accessioned | 2024-01-12T16:04:45Z | - |
| dc.date.available | 2024-01-12T16:04:45Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/91093 | - |
| dc.language | English | - |
| dc.subject | SiOXNY Encapsulation film | - |
| dc.subject | Plasma Enhanced Chemical Vapor Deposition | - |
| dc.title | SiOXNY Encapsulation film Fabricated by Plasma Enhanced Chemical Vapor Deposition | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국물리학회 학술논문발표회 | - |
| dc.citation.title | 한국물리학회 학술논문발표회 | - |
| dc.citation.conferencePlace | KO | - |
- Appears in Collections:
- KIST Conference Paper > Others
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
KIST 리포지터리는 국립중앙도서관 OAK 보급사업으로 구축되었습니다.