DSpace at KISTKIST Patent2015

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dc.contributor.author김성근-
dc.contributor.author정두석-
dc.contributor.author권범진-
dc.contributor.author편정준-
dc.contributor.author강종윤-
dc.contributor.author최지원-
dc.contributor.author김진상-
dc.contributor.author백승협-
dc.date.accessioned2024-01-12T17:03:11Z-
dc.date.available2024-01-12T17:03:11Z-
dc.date.issued2016-08-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/92092-
dc.title백금족 박막의 원자층 증착 방법-
dc.typePatent-
dc.date.registration2016-08-22-
dc.date.application2015-06-01-
dc.identifier.patentRegistrationNumber10-1651512-
dc.identifier.patentApplicationNumber2015-0077138-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2015
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