DSpace at KISTKIST Patent2012

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dc.contributor.author김영환-
dc.contributor.author김춘근-
dc.contributor.author김성일-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T17:32:34Z-
dc.date.available2024-01-12T17:32:34Z-
dc.date.issued2013-09-06-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/92615-
dc.title반도체 소자의 금속배선 및 그 제조방법-
dc.typePatent-
dc.date.registration2013-09-06-
dc.date.application2012-02-16-
dc.identifier.patentRegistrationNumber1307780-
dc.identifier.patentApplicationNumber2012-0015689-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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