KIST Library Institutional Repository

플라즈마 이온주입 장치 및 방법

Author

한승희; 전준홍; 문선우; 최진영; 박원웅

Assignee

한국과학기술연구원

Regitration Date

2013-05-20

Registration No.

10-1267459

Application Date

2011-09-08

Application No.

10-2011-0091468

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/92626

Appears in Collections:

KIST Patent > 2011

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