Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hyun-Soo, Kim | - |
| dc.contributor.author | Jaihyung Won | - |
| dc.contributor.author | Kim, Yong Tae | - |
| dc.contributor.author | Manyoung Sung | - |
| dc.date.accessioned | 2024-01-12T17:35:48Z | - |
| dc.date.available | 2024-01-12T17:35:48Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/92864 | - |
| dc.language | English | - |
| dc.publisher | MRS | - |
| dc.title | The study of Ge2Sb2Te5 films surface after chemical mechanical planarization in various slurries condition | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | 2013 MRS Spring Meeting | - |
| dc.citation.title | 2013 MRS Spring Meeting | - |
| dc.citation.conferencePlace | US | - |
- Appears in Collections:
- KIST Conference Paper > Others
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
KIST 리포지터리는 국립중앙도서관 OAK 보급사업으로 구축되었습니다.