DSpace at KISTKIST Patent2010

Full metadata record

DC Field Value Language
dc.contributor.author김성일-
dc.contributor.author김영환-
dc.contributor.author김춘근-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T18:00:28Z-
dc.date.available2024-01-12T18:00:28Z-
dc.date.issued2013-03-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/92991-
dc.title웨이퍼 탑재 유지 제어장치-
dc.typePatent-
dc.date.registration2013-03-15-
dc.date.application2010-07-30-
dc.identifier.patentRegistrationNumber10-1246333-
dc.identifier.patentApplicationNumber10-2010-0074104-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
Appears in Collections:
KIST Patent > 2010
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE