KIST Library Institutional Repository

웨이퍼 탑재 유지 제어장치

Author

김성일; 김영환; 김춘근; 김용태

Assignee

한국과학기술연구원

Regitration Date

2013-03-15

Registration No.

10-1246333

Application Date

2010-07-30

Application No.

10-2010-0074104

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/92991

Appears in Collections:

KIST Patent > 2010

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