DSpace at KISTKIST Patent2005

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dc.contributor.author강종윤-
dc.contributor.author김현재-
dc.contributor.author김달영-
dc.contributor.author윤석진-
dc.date.accessioned2024-01-12T18:02:56Z-
dc.date.available2024-01-12T18:02:56Z-
dc.date.issued2006-08-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93204-
dc.title전자빔으로 조절된 분역의 분극방향에 따른 식각속도 차이를 이용한 강유전체 나노점의 제작 방법-
dc.typePatent-
dc.date.registration2006-08-08-
dc.date.application2005-04-04-
dc.identifier.patentRegistrationNumber0612915-
dc.identifier.patentApplicationNumber2005-0028226-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2005
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