DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorHAN, SEUNG HEE-
dc.contributor.authorMoon Sun Woo-
dc.contributor.authorKim Sungmin-
dc.contributor.authorKim Kyeong-Hun-
dc.date.accessioned2024-01-12T18:05:14Z-
dc.date.available2024-01-12T18:05:14Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93370-
dc.languageEnglish-
dc.subjectplasma immersion ion implantation-
dc.subjectplasma-
dc.subjection implantation-
dc.subjectstrain-relaxed SiGe-
dc.subjectSiGe-
dc.subjectNon-gaseous plasma immersion ion implantation-
dc.subjectHiPIMS-
dc.titleStrain-relaxed SiGe layer on Si formed by PIII&D technology-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 12th International Workshop on PBIID-
dc.citation.titleThe 12th International Workshop on PBIID-
dc.citation.conferencePlaceFR-
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