Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | HAN, SEUNG HEE | - |
| dc.contributor.author | Moon Sun Woo | - |
| dc.contributor.author | Kim Sungmin | - |
| dc.contributor.author | Kim Kyeong-Hun | - |
| dc.date.accessioned | 2024-01-12T18:05:14Z | - |
| dc.date.available | 2024-01-12T18:05:14Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/93370 | - |
| dc.language | English | - |
| dc.subject | plasma immersion ion implantation | - |
| dc.subject | plasma | - |
| dc.subject | ion implantation | - |
| dc.subject | strain-relaxed SiGe | - |
| dc.subject | SiGe | - |
| dc.subject | Non-gaseous plasma immersion ion implantation | - |
| dc.subject | HiPIMS | - |
| dc.title | Strain-relaxed SiGe layer on Si formed by PIII&D technology | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | The 12th International Workshop on PBIID | - |
| dc.citation.title | The 12th International Workshop on PBIID | - |
| dc.citation.conferencePlace | FR | - |
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