KIST Library Institutional Repository

식각 선택비가 큰 버퍼층을 이용한 자기정렬 강유전체 게이트 트랜지스터의 제조방법

Author

김용태; 김성일; 김영환; 심선일; 김춘근

Assignee

한국과학기술연구원

Regitration Date

2006-01-09

Registration No.

0543528

Application Date

2003-08-26

Application No.

2003-0059188

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/93534

Appears in Collections:

KIST Patent > 2003

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