KIST Library Institutional Repository

실리콘기판상에　성장된GaAs에피택셜층의　유기금속화학　증착법에　의한　델타－도핑형성　방법

Author

민석기; 김무성; 김용

Assignee

한국과학기술연구원

Regitration Date

1994-01-25

Registration No.

5,281,551

Application Date

1992-07-07

Application No.

07/909,935

Country

US

URI

https://pubs.kist.re.kr/handle/201004/93740

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML