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dc.contributor.author나종갑-
dc.date.accessioned2024-01-12T19:00:57Z-
dc.date.available2024-01-12T19:00:57Z-
dc.date.issued1999-10-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94156-
dc.title자성　박막　형성을　위한　스파터링　타겟　및　그　제조방법-
dc.typePatent-
dc.date.registration1999-10-07-
dc.date.application1996-08-01-
dc.identifier.patentRegistrationNumber237316-
dc.identifier.patentApplicationNumber96-32163-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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