자성 박막 형성을 위한 스파터링 타겟 및 그 제조방법

Author
나종갑
Assignee
한국과학기술연구원
Regitration Date
1999-10-07
Registration No.
237316
Application Date
1996-08-01
Application No.
96-32163
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94156
Appears in Collections:
KIST Patent > Others
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