육각 나노피라미드 실리콘 나노구조 제조 방법 및 이러한 구조를 포함하는 디바이스

Author
김인호이도권이영석이경석박종극
Assignee
한국과학기술연구원
Regitration Date
2021-09-27
Registration No.
10-2307936
Application Date
2019-11-29
Application No.
10-2019-0156929
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94352
Appears in Collections:
KIST Patent > 2019
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