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Microstructure of study of cubic boron nitride thin film deposited by UBM method with hydrogen addition

Authors

Ko Ji sun; JONG-KEUK, PARK; Lee, Wook Seong; 허주열; Baik, Young Joon

Citation

ICMCTF 2012

URI

https://pubs.kist.re.kr/handle/201004/94503

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KIST Conference Paper > Others

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