GaAs EPD 향상을 위한 온도 구배 안정화 장치

Author
최원준김덕준정현석
Assignee
한국과학기술연구원
Regitration Date
2019-03-05
Registration No.
10-1956754
Application Date
2017-08-01
Application No.
2017-0097531
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94816
Appears in Collections:
KIST Patent > 2017
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