KIST Library Institutional Repository

메타물질 기반 센싱 소자를 이용한 박막의 전기적 특성 비접촉식 관찰 방법

Author

서민아; 이상훈; 김진수; 박규환; 최종호; 김철기

Assignee

한국과학기술연구원

Regitration Date

2019-11-19

Registration No.

10481188

Application Date

2018-01-18

Application No.

15/874415

Country

US

URI

https://pubs.kist.re.kr/handle/201004/94830

Appears in Collections:

KIST Patent > 2018

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