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Redistribution Reaction of Trichlorosilane to Dichlorosilane

Authors

Lee Dong won; HAN, JOON SOO; Yoo, Bok Ryul; 이명의

Citation

한국공업화학회, pp.204

Keywords

Silane; Redistriution reaction; Trichlorosilane

URI

https://pubs.kist.re.kr/handle/201004/94972

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KIST Conference Paper > Others

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