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dc.contributor.authorJONG-KEUK, PARK-
dc.contributor.authorKo Ji sun-
dc.contributor.authorLee, Wook Seong-
dc.contributor.authorBaik, Young Joon-
dc.date.accessioned2024-01-12T19:36:45Z-
dc.date.available2024-01-12T19:36:45Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95164-
dc.languageEnglish-
dc.titleEffect of hydrogen addition on the residual stress of cubic boron nitride film prepared by R.F. magnetron sputtering of B4C target-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationICMCTF-2012-
dc.citation.titleICMCTF-2012-
dc.citation.conferencePlaceUS-
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KIST Conference Paper > Others
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