KIST Library Institutional Repository

마스크 패턴 검사용 3차원 영상 획득 시스템 및 그 방법

Author

이호동; 박민철; 전영민; 최영선; 김용태; 조정근; 김기혁; 한현나; 조성진

Assignee

한국과학기술연구원

Regitration Date

2013-06-07

Registration No.

10-1274609

Application Date

2011-10-13

Application No.

2011-0104561

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/95499

Appears in Collections:

KIST Patent > 2011

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