실리콘 함유 다이아몬드상 카본 박막, 그 제조방법 및 용도

Author
문명운김해리이진우이광렬
Assignee
한국과학기술연구원
Regitration Date
2015-06-11
Registration No.
10-1529527
Application Date
2012-05-24
Application No.
10-2012-7013507
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/95903
Appears in Collections:
KIST Patent > 2012
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