발열부 일체형 진공 박막 증착용 분자빔 증발원, 그제작 방법 및 증발기

Author
우덕하김선호이석김신근전영민김재헌변영태
Assignee
한국과학기술연구원
Regitration Date
2012-05-31
Registration No.
1153934
Application Date
2009-11-24
Application No.
10-2009-0114068
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/95909
Appears in Collections:
KIST Patent > 2009
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