DSpace at KISTKIST Patent2011

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dc.contributor.author한승희-
dc.contributor.author변지영-
dc.contributor.author석현광-
dc.contributor.author신상범-
dc.contributor.author김유찬-
dc.contributor.author이성배-
dc.contributor.author최진영-
dc.contributor.author한준현-
dc.date.accessioned2024-01-12T20:31:59Z-
dc.date.available2024-01-12T20:31:59Z-
dc.date.issued2015-09-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95935-
dc.title고체 원소 플라즈마 이온주입 방법 및 장치-
dc.typePatent-
dc.date.registration2015-09-22-
dc.date.application2011-03-10-
dc.identifier.patentRegistrationNumber9,139,902-
dc.identifier.patentApplicationNumber13/044,621-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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