DSpace at KISTKIST Patent2009

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dc.contributor.author석현광-
dc.contributor.author백경호-
dc.contributor.author이해원-
dc.date.accessioned2024-01-12T20:33:30Z-
dc.date.available2024-01-12T20:33:30Z-
dc.date.issued2010-01-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96045-
dc.title반도체 제조 장비용 열용사 코팅물질, 그 제조방법 및 코팅방법-
dc.typePatent-
dc.date.registration2010-01-29-
dc.date.application2009-11-09-
dc.identifier.patentRegistrationNumber10-0940812-
dc.identifier.patentApplicationNumber10-2009-0107645-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2009
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