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dc.contributor.author이광렬-
dc.contributor.author이철승-
dc.contributor.author윤기현-
dc.date.accessioned2024-01-12T21:01:53Z-
dc.date.available2024-01-12T21:01:53Z-
dc.date.issued2004-06-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96473-
dc.title실리콘을 함유한 초경질 다이아몬드상 탄소박막 및 그 제조방법-
dc.typePatent-
dc.date.registration2004-06-08-
dc.date.application2001-10-31-
dc.identifier.patentRegistrationNumber0436565-
dc.identifier.patentApplicationNumber2001-0067540-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2001
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