화학증착용 유기티탄 전구체 및 그의 제조 방법

Author
우경자
Assignee
한국과학기술연구원
Regitration Date
2007-01-12
Registration No.
3902957
Application Date
2002-01-21
Application No.
2002-12110
Country
JA
URI
https://pubs.kist.re.kr/handle/201004/96489
Appears in Collections:
KIST Patent > 2002
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