KIST Library Institutional Repository

고주파　플라즈마　화학증착법을　이용한원형　기판용　코팅층의　대량　합성장　치　및　합성방법

Author

은광용; 이광렬

Assignee

한국과학기술연구원

Regitration Date

1997-03-18

Registration No.

5,611,862

Application Date

1995-08-15

Application No.

08/515,429

Country

US

URI

https://pubs.kist.re.kr/handle/201004/96662

Appears in Collections:

KIST Patent > Others

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