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Characteristics of Al:doped ZnO thin films by HIPIMS (High Power Impulse Magnetron sputtering) with unbalanced magnetron

Authors

Park Dong Hee; Yang Jeong-do; Ji-Won Choi; CHOI, WON-KOOK

Citation

International Symposium on Transparent Conductive Coatings

Keywords

Zinc Oxide; Transparent conducting oxide; HIPIMS

URI

https://pubs.kist.re.kr/handle/201004/96717

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KIST Conference Paper > Others

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