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Enhancement of electrical properties in Al-doped ZnO films by turning dc bias voltage during radio frequency magnetron sputtering

Authors

No Young-Soo; Park Dong Hee; T.W. Kim; Ji-Won Choi; B. Angadi; CHOI, WON-KOOK

Citation

International Symposium on Transparent Conductive Coatings

Keywords

Structural property; Optical property; Al-doped ZnO; Electrodeposition

URI

https://pubs.kist.re.kr/handle/201004/96718

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KIST Conference Paper > Others

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