Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | HAN, SEUNG HEE | - |
dc.contributor.author | Jeon Jun-hong | - |
dc.contributor.author | Choi Jin-young | - |
dc.contributor.author | Park Won Woong | - |
dc.contributor.author | Moon Sun Woo | - |
dc.date.accessioned | 2024-01-12T21:36:11Z | - |
dc.date.available | 2024-01-12T21:36:11Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/97353 | - |
dc.language | English | - |
dc.subject | plasma immersion ion implantation | - |
dc.subject | plasma | - |
dc.subject | HiPIMS | - |
dc.subject | non-gaseous ion implantation | - |
dc.subject | surface modification | - |
dc.title | Research Activities on PIII&D Technology at KIST | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | PBII&D'2011 | - |
dc.citation.title | PBII&D'2011 | - |
dc.citation.conferencePlace | CC | - |
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