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dc.contributor.authorHAN, SEUNG HEE-
dc.contributor.authorJeon Jun-hong-
dc.contributor.authorChoi Jin-young-
dc.contributor.authorPark Won Woong-
dc.contributor.authorMoon Sun Woo-
dc.date.accessioned2024-01-12T21:36:11Z-
dc.date.available2024-01-12T21:36:11Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97353-
dc.languageEnglish-
dc.subjectplasma immersion ion implantation-
dc.subjectplasma-
dc.subjectHiPIMS-
dc.subjectnon-gaseous ion implantation-
dc.subjectsurface modification-
dc.titleResearch Activities on PIII&D Technology at KIST-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationPBII&D'2011-
dc.citation.titlePBII&D'2011-
dc.citation.conferencePlaceCC-
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KIST Conference Paper > Others
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