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Research Activities on PIII&D Technology at KIST

Authors

HAN, SEUNG HEE; Jeon Jun-hong; Choi Jin-young; Park Won Woong; Moon Sun Woo

Citation

PBII&D'2011

Keywords

plasma immersion ion implantation; plasma; HiPIMS; non-gaseous ion implantation; surface modification

URI

https://pubs.kist.re.kr/handle/201004/97353

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KIST Conference Paper > Others

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