Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hun-su Lee | - |
| dc.contributor.author | Yun-Seong Lee | - |
| dc.contributor.author | Sang-Hun Seo | - |
| dc.contributor.author | Hong-Young Chang | - |
| dc.date.accessioned | 2024-01-12T21:37:31Z | - |
| dc.date.available | 2024-01-12T21:37:31Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/97450 | - |
| dc.language | English | - |
| dc.subject | Hollow cathode | - |
| dc.subject | plasma density | - |
| dc.subject | frequency | - |
| dc.subject | multi hole electrode | - |
| dc.title | FREQUENCY EFFECT OF MULTI HOLE RF CCP DISCHARGE | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | IFFM2011 | - |
| dc.citation.title | IFFM2011 | - |
| dc.citation.conferencePlace | KO | - |
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