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dc.contributor.author박재현-
dc.contributor.author김재경-
dc.contributor.author심유민-
dc.date.accessioned2024-01-12T22:01:30Z-
dc.date.available2024-01-12T22:01:30Z-
dc.date.issued2020-04-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97600-
dc.title헥사고날 보론 니트라이드 박막의 제조 방법 및 이를 이용한 다층 구조의 제조 방법 및 스위칭 소자의 제조 방법-
dc.typePatent-
dc.date.registration2020-04-21-
dc.date.application2018-11-27-
dc.identifier.patentRegistrationNumber10629696-
dc.identifier.patentApplicationNumber16/201293-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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