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dc.contributor.author김형철-
dc.contributor.author김정훈-
dc.contributor.author이승용-
dc.contributor.author최만수-
dc.contributor.author신성수-
dc.contributor.author손지원-
dc.date.accessioned2024-01-12T22:02:30Z-
dc.date.available2024-01-12T22:02:30Z-
dc.date.issued2019-01-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97672-
dc.title습도 제어를 이용한 전구체 솔루션의 침투 방법-
dc.typePatent-
dc.date.registration2019-01-04-
dc.date.application2017-12-07-
dc.identifier.patentRegistrationNumber10-1940174-
dc.identifier.patentApplicationNumber2017-0167114-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2017
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