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습도 제어를 이용한 전구체 솔루션의 침투 방법

Author

김형철; 김정훈; 이승용; 최만수; 신성수; 손지원

Assignee

한국과학기술연구원

Regitration Date

2019-01-04

Registration No.

10-1940174

Application Date

2017-12-07

Application No.

2017-0167114

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/97672

Appears in Collections:

KIST Patent > 2017

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