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나노선 박막, 나노선 및 물리 증착법을 이용한 나노선 박막의 제조방법

Author

김주선; 권은석; 최선희; 김병국

Assignee

한국과학기술연구원

Regitration Date

2014-07-14

Registration No.

1421130

Application Date

2012-11-14

Application No.

2012-0129066

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/98344

Appears in Collections:

KIST Patent > 2012

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